Sentaurus Mesh

Sentaurus Mesh is a modular Delaunay 2D and 3D mesh generator that can create axis-aligned, boundary-conforming, and tensor meshes to be used in simulators that use the box discretization or finite-difference time-domain (FDTD) methods.

The axis-aligned mesh generator of Sentaurus Mesh produces triangles in the case of 2D devices and tetrahedra in the case of 3D devices. Generated grids can be loaded into Sentaurus Device, Sentaurus Process, and Sentaurus Interconnect.

The tensor-product mesh generator produces rectangular elements in two dimensions and cuboidal elements in three dimensions. Such grids are used in Sentaurus Device Electromagnetic Wave Solver.

This module is a basic introduction to the features of Sentaurus Mesh.

Section	Time
1. Getting Started	20 minutes
2. Using the Axis-Aligned Mesh Generator	2 hours
3. Using the Tensor-Product Mesh Generator	30 minutes
4. Tools Section	30 minutes