TCAD Sentaurus™ Tutorial

These modules are intended as an introduction to using the TCAD Sentaurus tool suite. They are designed specifically for new users and provide examples with which to begin using the tools.

Module	Description
Tool Overview	An overview of the TCAD Sentaurus tool suite is presented.
Sentaurus Workbench	Sentaurus Workbench is the graphical front end that integrates TCAD Sentaurus simulation tools into one environment. It is used to design, organize, and run simulations.
Sentaurus Process	Sentaurus Process is a complete and highly flexible multidimensional process modeling environment. It constitutes a solid base for process simulation.
IC WorkBench Edit/View Plus Interface	The interface between TCAD Sentaurus and IC WorkBench Edit/View Plus is used to process mask information such that it can be used in Sentaurus Process and Sentaurus Interconnect.
Sentaurus Topography 3D	Sentaurus Topography 3D is an advanced three-dimensional simulator for evaluating and optimizing critical topography-processing steps such as etching and deposition.
Sentaurus Interconnect	Sentaurus Interconnect is an advanced 1D, 2D, and 3D simulator suitable for IC interconnect reliability analysis.
Sentaurus Structure Editor	Sentaurus Structure Editor is a 2D and 3D device editor, and 3D process emulator. It is based on CAD technology, features a powerful user interface, and is fully scriptable.
Sentaurus Mesh	Sentaurus Mesh is a modular Delaunay mesh generator of high-quality spatial discretization grids for complex 2D and 3D devices. It integrates the axis-aligned mesh generator and the tensor-product mesh generator.
Sentaurus Device	Sentaurus Device simulates the electrical, thermal, and optical characteristics of semiconductor devices. It is the leading device simulator and handles 1D, 2D, and 3D geometries, mixed-mode circuit simulation with compact models, and numeric devices.
Sentaurus Device EMW	Sentaurus Device Electromagnetic Wave Solver is a simulation module for the numeric analysis of electromagnetic waves. It is a full-wave time-domain simulator based on the finite-difference time-domain method. It is used typically to calculate the optical carrier generation in optoelectronic devices.
Sentaurus Visual	Sentaurus Visual is a plotting tool for visualizing data from TCAD simulations and experiments. Its user interface enables users to work interactively with data and to automate tasks with Tcl-based scripting.
Inspect	Inspect is a plotting and analysis tool for xy data such as doping profiles and electrical characteristics of semiconductor devices.
Sentaurus Data Explorer	Sentaurus Data Explorer is a tool for editing and converting data from simulations.
Tool Command Language	Several TCAD Sentaurus products use the tool command language (Tcl), and it is advantageous to know some basics about Tcl.
jEdit	jEdit is a powerful and freely available open-source tool for context-sensitive editing. Synopsys has created a TCAD Sentaurus customization package for jEdit to improve the ease of working with different TCAD Sentaurus tools.
Tips & Tricks	Tips & Tricks provides specific assistance to users to improve the quality, the turnaround time, and the robustness of TCAD simulations.